S-shaped magnetic macroparticle filter for cathodic arc deposition

A new magnetic macroparticle filter design consisting of two 90/spl deg/ filters forming an S shape is described, The transport properties of this S filter are investigated using Langmuir and deposition probes. It is shown that the filter efficiency is the product of the efficiencies of two 90/spl d...

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Bibliographic Details
Published inIEEE transactions on plasma science Vol. 25; no. 4; pp. 670 - 674
Main Authors Anders, S., Anders, A., Dickinson, M.R., MacGill, R.A., Brown, I.G.
Format Journal Article
LanguageEnglish
Published New York IEEE 01.08.1997
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Amorphous magnetic materials
Bellows
Cathodes
Filtering
Filters
Magnetic fields
Magnetic separation
Magnetism
Plasma
Plasma sources
Shape
Solenoids
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Summary:A new magnetic macroparticle filter design consisting of two 90/spl deg/ filters forming an S shape is described, The transport properties of this S filter are investigated using Langmuir and deposition probes. It is shown that the filter efficiency is the product of the efficiencies of two 90/spl deg/ filters, and the deposition rate is still acceptably high to perform thin-film deposition. Films of amorphous hard carbon have been deposited using a 90/spl deg/ filter and the S filter, and the macroparticle contents of the films are compared.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0093-3813
1939-9375
DOI:10.1109/27.640683