Error compensation for three-dimensional profile measurement system

Three-dimensional （3D） profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool ra...

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Bibliographic Details
Published inFrontiers of Optoelectronics (Online) Vol. 8; no. 4; pp. 402 - 412
Main Authors Ye, Xu, Cheng, Haobo, Dong, Zhichao, Tam, Hon-Yuen
Format Journal Article
LanguageEnglish
Published Beijing Higher Education Press 01.12.2015
Subjects
Biomedical Engineering and Bioengineering
Electrical Engineering
Engineering
Physics
Research Article
三维轮廓测量系统
仿真分析
几何分析
刀具半径补偿
最小二乘法
测量误差
误差校正
误差补偿
aspheric surface
alignment error
error compensation
three-dimensional (3D) profile measurement
Online AccessGet full text
ISSN2095-2759
2095-2767
DOI10.1007/s12200-015-0497-8

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Summary:Three-dimensional （3D） profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.22.
Bibliography:Three-dimensional （3D） profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.22.
aspheric surface, three-dimensional （3D） pro-file measurement, alignment error, error compensation
11-5738/TN
ISSN:2095-2759
2095-2767
DOI:10.1007/s12200-015-0497-8