A Novel Love Wave Mode Sensor Waveguide Layer with Microphononic Crystals

Surface acoustic wave (SAW) sensors have been applied in various areas with many advantages, such as their small size, high sensitivity and wireless and passive form. Love wave mode sensors, an important kind of SAW sensor, are mostly used in biology and chemistry monitoring, as they can be used in...

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Bibliographic Details
Published inApplied sciences Vol. 11; no. 17; p. 8123
Main Authors Tian, Yahui, Li, Honglang, Chen, Wencan, Lu, Zixiao, Luo, Wei, Mu, Xihui, Wang, Litian
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 01.09.2021
Subjects
Acoustics
Biomonitoring
Crystal structure
Crystals
delay line
Delay lines
Eigenvalues
Electric fields
Finite element analysis
love wave mode
Love waves
Microbiology
Microelectromechanical systems
Microfluidics
Microstructure
phononic crystals
Propagation
sensor
Sensors
surface acoustic wave
Surface acoustic wave devices
Wave attenuation
Waveguides
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Summary:Surface acoustic wave (SAW) sensors have been applied in various areas with many advantages, such as their small size, high sensitivity and wireless and passive form. Love wave mode sensors, an important kind of SAW sensor, are mostly used in biology and chemistry monitoring, as they can be used in a liquid environment. Common Love wave mode sensors consist of a delay line with waveguide and sensitive layers. To extend the application of Love wave mode sensors, this article reports a novel Love wave mode sensor consisting of a waveguide layer with microphononic crystals (PnCs). To analyze the properties of the new structure, the band structure was calculated, and transmission was obtained by introducing delay line structures and quasi-three-dimensional models. Furthermore, devices with a traditional structure and novel structure were fabricated. The results show that, by introducing the designed microstructure of phononic crystals in the waveguide layer, the attenuation was barely increased, and the frequency was shifted by a small amount. In the liquid environmental experiments, the novel structure with micro PnCs shows even better character than the traditional one. Moreover, the introduced microstructure can be extended to microreaction tanks for microcontrol. Therefore, this novel Love wave mode sensor is a promising application for combining acoustic sensors and microfluidics.
ISSN:2076-3417
2076-3417
DOI:10.3390/app11178123