Mirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process Applications

We present a Mirau-type coherence scanning interferometer (CSI) with an oscillating reference mirror and an integrated interferometric distance sensor (IDS) sharing the optical path with the CSI. The IDS works simultaneously with the CSI and measures the distance changes during the depth scanning pr...

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Bibliographic Details
Published inApplied sciences Vol. 11; no. 20; p. 9642
Main Authors Serbes, Hüseyin, Gollor, Pascal, Hagemeier, Sebastian, Lehmann, Peter
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 01.10.2021
Subjects
Cameras
coherence scanning interferometry
Compensation
in-process application
Industrial applications
Interferometers
interferometric distance sensor
Lasers
Light
Mirau interferometer
optical path length modulation
Scanning
Sensors
Signal processing
Temporal resolution
Topography
Vibration
vibration compensation
Vibrations
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Summary:We present a Mirau-type coherence scanning interferometer (CSI) with an oscillating reference mirror and an integrated interferometric distance sensor (IDS) sharing the optical path with the CSI. The IDS works simultaneously with the CSI and measures the distance changes during the depth scanning process with high temporal resolution. The additional information acquired by the IDS is used to correct the CSI data disturbed by unwanted distance changes due to environmental vibrations subsequent to the measurement. Due to the fixed reference mirror in commercial Mirau objectives, a Mirau attachment (MA) comprising an oscillating reference mirror is designed and built. Compared to our previous systems based on the Michelson and the Linnik interferometer, the MA represents a novel solution that completes the range of possible applications. Due to its advantages, the Mirau setup is the preferred and most frequently used interferometer type in industry. Therefore, the industrial use is ensured by this development. We investigate the functioning of the system and the capability of the vibration compensation by several measurements on various surface topographies.
ISSN:2076-3417
2076-3417
DOI:10.3390/app11209642