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Summary:The use of energetic noble gas atoms for ion beam mixing studies or the modification of materials necessitates an understanding of the effects produced by the retained gas atoms. A systematic study of the microstructural evolution in Al after 65 keV Kr + implantation (dose range 2 × 10 16 Kr + m −2 ≤ φ ≤ 6 × 10 20 Kr + m −2, at ambient temperature was performed using transmission electron microscopy (TEM) and Rutherford backscattering (RBS). At low doses (≲2 × 10 18 Kr + m −2) isolated dislocation loops and the evolution of a dislocation network is observed. For φ 10 19 Kr + m −2 the microstructure is dominated by a high density of small cavities. Additional reflections in the electron diffraction pattern indicate that the cavities (bubbles) contain solid fcc Kr epitaxially aligned with the fcc Al. A typical internal pressure of about 22 kbar can be estimated for bubbles 1.7 nm in diameter and 16 kbar for 2.8 nm bubbles. The average bubble size increases with φ, and for φ $ ̆ 2 × 10 20 Kr +m −2 an increasing Kr fraction is in a liquid or gas-like phase.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
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ISSN:0022-3115
1873-4820
DOI:10.1016/0022-3115(85)90088-1