Lateral Control of Indium Content and Wavelength of III--Nitride Diode Lasers by Means of GaN Substrate Patterning
A patterned GaN/sapphire template with separate regions angled between 0.4 and 2° to the wurtzite $c$-plane was used to grow a 50 nm In 0.1 Ga 0.9 N layer. The photoluminescence wavelength varied between 403 and 389 nm according to the increased region's angle. The indium content measured using...
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Published in | Applied physics express Vol. 5; no. 2; pp. 021001 - 021001-3 |
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Main Authors | , , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
The Japan Society of Applied Physics
01.02.2012
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Online Access | Get full text |
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Summary: | A patterned GaN/sapphire template with separate regions angled between 0.4 and 2° to the wurtzite $c$-plane was used to grow a 50 nm In 0.1 Ga 0.9 N layer. The photoluminescence wavelength varied between 403 and 389 nm according to the increased region's angle. The indium content measured using X-rays was reduced in regions with a higher miscut angle. Patterned freestanding GaN with separate regions angled by 0.35 and 0.85° to the $c$-plane was used to fabricate ridge-waveguide diode lasers. Each laser stripe was placed inside one of the angled regions. Lasing wavelengths of $405.8\pm 0.2$ and $401.0\pm 1$ nm were obtained for devices grown in those regions. |
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Bibliography: | Patterned GaN substrate with flat top and bottom regions and angled slope regions. Optical microscopy image with Nomarki contrast is horizontally aligned with a stylus profile scan of the surface. In the pattern shown, the slope angle was 2.0°. Photoluminescence wavelength of InGaN layer grown on patterned GaN/sapphire substrate and its indium content measured by XRD for different slope angles. Solid lines are guides to the eye. A schematic view of an LD bar grown on patterned GaN substrate. Note that the slopes for chips A and B are angled differently. Lasing spectra of six adjacent devices from a single bar. The lasing wavelength for chip A (B) is longer (shorter) due to less (more) angled slopes of the GaN substrate and, hence, more (less) indium in the active region. |
ISSN: | 1882-0778 1882-0786 |
DOI: | 10.1143/APEX.5.021001 |