Achievement of extremely high vacuum using a cryopump and conflat aluminium gaskets

An extremely high vacuum of 2 × 10 −12 mbar, the lowest pressure measurable with the extractor gauge, was achieved using a closed loop helium refrigerator type cryopump and conflat aluminium gaskets. The preparation of aluminium gaskets and the baking process of the vacuum system and the cryopump ar...

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Bibliographic Details
Published inVacuum Vol. 43; no. 4; pp. 309 - 311
Main Authors Kwang Hwa Chung Jhung, Seung-Soo, Hong, Park, Jae-Hong, Shin, Yong-Hyun, Leem, Jae-Young, Lee, Chul-Ro
Format Journal Article
LanguageEnglish
Published Oxford Elsevier Ltd 1992
Elsevier
Subjects
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Vacuum apparatus and techniques
Vacuum pump
Pressure measurement
Ultrahigh vacuum
Gasket
Cryopump
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Summary:An extremely high vacuum of 2 × 10 −12 mbar, the lowest pressure measurable with the extractor gauge, was achieved using a closed loop helium refrigerator type cryopump and conflat aluminium gaskets. The preparation of aluminium gaskets and the baking process of the vacuum system and the cryopump are reported here.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(92)90162-P