A comparison of perfluoropolyether and silicone diffusion pump fluids

The performance of silicone and perfluoropolyether as diffusion pump fluids is compored experimentally, and reasons for the observed difference in pumping efficiency are presented.

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Bibliographic Details
Published inVacuum Vol. 43; no. 4; pp. 301 - 304
Main Authors Hirsch, EH, McKay, TJ
Format Journal Article
LanguageEnglish
Published Oxford Elsevier Ltd 1992
Elsevier
Subjects
Diffusion
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Q1
Vacuum apparatus and techniques
Vacuum pumping
Organic perhalocompound
Fluorine Organic compounds
Fluid layer
Ether polymer
Diffusion pump
Experimental study
Siloxane polymer
Comparative study
Thin film
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Summary:The performance of silicone and perfluoropolyether as diffusion pump fluids is compored experimentally, and reasons for the observed difference in pumping efficiency are presented.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(92)90160-X