Study on the layer structure of W/C multilayers deposited by magnetron sputtering using x-ray reflectivity

• Published in: Surface and interface analysis Vol. 40; no. 12; pp. 1562 - 1565
• Main Authors: Deng, Songwen, Qi, Hongji, Shao, Jianda
• Format: Journal Article
• Language: English
• Published: Chichester, UK John Wiley & Sons, Ltd 01.12.2008; Wiley
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Diffusion; interface formation; Exact sciences and technology; interface; Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties; magnetron sputtering; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; multilayer structure; Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity); Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Physics; Solid surfaces and solid-solid interfaces; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); x-ray reflectivity; Soft X radiation; Grazing incidence; Interdiffusion; magnetron sputtering; X-ray spectra; multilayer structure; interface; Carbon; Film growth; Reflectivity; Magnetrons; Multilayers; Cathode sputtering; Reflection spectrum; Tungsten; x-ray reflectivity; Optical constants

A study on the layer structure of W/C multilayers deposited by magnetron sputtering is reported. In the study, soft x‐ray resonant reflectivity and hard x‐ray grazing incidence reflectivity of the W/C multilayers were measured. The imperfections at the interface such as interdiffusion and formation...