Study on the layer structure of W/C multilayers deposited by magnetron sputtering using x-ray reflectivity

• Published in: Surface and interface analysis Vol. 40; no. 12; pp. 1562 - 1565
• Main Authors: Deng, Songwen, Qi, Hongji, Shao, Jianda
• Format: Journal Article
• Language: English
• Published: Chichester, UK John Wiley & Sons, Ltd 01.12.2008; Wiley
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Diffusion; interface formation; Exact sciences and technology; interface; Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties; magnetron sputtering; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; multilayer structure; Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity); Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Physics; Solid surfaces and solid-solid interfaces; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); x-ray reflectivity; Soft X radiation; Grazing incidence; Interdiffusion; magnetron sputtering; X-ray spectra; multilayer structure; interface; Carbon; Film growth; Reflectivity; Magnetrons; Multilayers; Cathode sputtering; Reflection spectrum; Tungsten; x-ray reflectivity; Optical constants
• ISSN: 0142-2421; 1096-9918
• DOI: 10.1002/sia.2952

A study on the layer structure of W/C multilayers deposited by magnetron sputtering is reported. In the study, soft x‐ray resonant reflectivity and hard x‐ray grazing incidence reflectivity of the W/C multilayers were measured. The imperfections at the interface such as interdiffusion and formation of compounds were dealt with by two methods. On analyzing the experimental results, we found that the incorporation of an interlayer was a more suitable method than the traditional statistical method to describe the layer structure of a W/C system we fabricated. The optical constants of each layer at a wavelength of 4.48 nm were also obtained from the analysis. Copyright © 2008 John Wiley & Sons, Ltd.