High-Tolerance Grating Couplers for Vertical Backside Coupling

• Published in: Applied sciences Vol. 14; no. 23; p. 11015
• Main Authors: Chen, Jui-Hung, Bouamra, Arthur D., Wu, Chia-Ling, Fiore, Andrea, Tseng, Shuo-Yen
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 01.12.2024
• Subjects: Design; Geometry; grating coupler; Light; optical fiber sensors; Optimization; photonic integrated circuits; Photonics; Semiconductors; Sensors

To facilitate convenient packaging of photonic integrated circuits on a fiber tip, a silicon grating coupler designed for vertical backside coupling has been developed. In order to comply with foundry capabilities and streamline the fabrication processes, the grating coupler features a minimum featu...