High-Tolerance Grating Couplers for Vertical Backside Coupling

To facilitate convenient packaging of photonic integrated circuits on a fiber tip, a silicon grating coupler designed for vertical backside coupling has been developed. In order to comply with foundry capabilities and streamline the fabrication processes, the grating coupler features a minimum featu...

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Bibliographic Details
Published inApplied sciences Vol. 14; no. 23; p. 11015
Main Authors Chen, Jui-Hung, Bouamra, Arthur D., Wu, Chia-Ling, Fiore, Andrea, Tseng, Shuo-Yen
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 01.12.2024
Subjects
Design
Geometry
grating coupler
Light
optical fiber sensors
Optimization
photonic integrated circuits
Photonics
Semiconductors
Sensors
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Summary:To facilitate convenient packaging of photonic integrated circuits on a fiber tip, a silicon grating coupler designed for vertical backside coupling has been developed. In order to comply with foundry capabilities and streamline the fabrication processes, the grating coupler features a minimum feature size larger than 200 nm and a single-etched structure on silicon. By inverse design-based optimization, the vertical backside grating coupler achieves a coupling efficiency of nearly 40% (−3.97 dB), while showcasing high fabrication and misalignment tolerance.
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content type line 14
ISSN:2076-3417
2076-3417
DOI:10.3390/app142311015