Electrochromic performance of PECVD-synthesized WOxCy thin films on flexible PET/ITO substrates for flexible electrochromic devices

• Published in: Thin solid films Vol. 518; no. 5; pp. 1377 - 1381
• Main Authors: Lin, Yung-Sen, Chen, Hsuan-Ta, Lai, Jhe-Yi
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 31.12.2009
• Subjects: Cyclic voltammetry; Electrochromism; Flexible substrate; PECVD; Tungsten oxide; Cyclic voltammetry; Flexible substrate; Tungsten oxide; Electrochromism; PECVD
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2009.09.075

Electrochromic performance of WOxCy films deposited onto 60Ω/□ flexible PET (polyethylene terephthalate)/ITO (indium tin oxide) substrates by low temperature plasma-enhanced chemical vapor deposition (PECVD) was investigated. It was proven that extraordinary electrochromic performance was provided when the precursor [tungsten carbonyl, W(CO)6; TC] vapor, carried by argon gas, was mixed with air gas and synthesized by radio frequency (r.f.) power at room temperature (23°C). Cyclic voltammetry switching measurements found that only low driving voltages from −1V to 1V were needed to provide reversible Li+ ion intercalation and de-intercalation. The light modulation with up to 63.6% of transmittance variation at a wavelength of 650nm was obtained for 150cycles of Li+ intercalation and de-intercalation in a 0.1M LiClO4-PC (propylene carbonate) electrolyte.