Single axis accelerometer fabricated using printed circuit board techniques and laser ablation

Low-cost accelerometers could be used in applications where extremely good characteristics are not a requirement. This paper presents an accelerometer fabricated using printed circuit board (PCB) processing techniques, and laser ablation. Laser is used to remove part of the PCB substrate, releasing...

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 192; pp. 119 - 123
Main Authors Luque, A., Flores, G., Perdigones, F., Medina, D., García, J., Quero, J.M.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.04.2013
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Summary:Low-cost accelerometers could be used in applications where extremely good characteristics are not a requirement. This paper presents an accelerometer fabricated using printed circuit board (PCB) processing techniques, and laser ablation. Laser is used to remove part of the PCB substrate, releasing a mass suspended by copper beams. The structure is easily bonded to another PCB, creating a variable parallel-plate capacitor with a small gap, which capacitance varies with the movement of the mass, caused by external acceleration. The fabricated accelerometer has been compared to a commercial silicon one, showing good agreement in the measurements. The measured sensitivity was 81fF/g.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2012.11.044