Single axis accelerometer fabricated using printed circuit board techniques and laser ablation
Low-cost accelerometers could be used in applications where extremely good characteristics are not a requirement. This paper presents an accelerometer fabricated using printed circuit board (PCB) processing techniques, and laser ablation. Laser is used to remove part of the PCB substrate, releasing...
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Published in | Sensors and actuators. A. Physical. Vol. 192; pp. 119 - 123 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
01.04.2013
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Subjects | |
Online Access | Get full text |
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Summary: | Low-cost accelerometers could be used in applications where extremely good characteristics are not a requirement. This paper presents an accelerometer fabricated using printed circuit board (PCB) processing techniques, and laser ablation. Laser is used to remove part of the PCB substrate, releasing a mass suspended by copper beams. The structure is easily bonded to another PCB, creating a variable parallel-plate capacitor with a small gap, which capacitance varies with the movement of the mass, caused by external acceleration. The fabricated accelerometer has been compared to a commercial silicon one, showing good agreement in the measurements. The measured sensitivity was 81fF/g. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0924-4247 1873-3069 |
DOI: | 10.1016/j.sna.2012.11.044 |