A plastic-based bolometer array sensor using carbon nanotubes for low-cost infrared imaging devices

• Published in: Sensors and actuators. A. Physical. Vol. 195; pp. 142 - 147
• Main Authors: Narita, Kaoru, Kuribayashi, Ryosuke, Altintas, Ersin, Someya, Hiroko, Tsuda, Kenichiro, Ohashi, Keishi, Tabuchi, Toru, Okubo, Shuichi, Imazato, Masaharu, Komatsubara, Shigeyuki
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.06.2013
• Subjects: Arrays; Bolometer; Bolometers; Carbon nanotube; Carbon nanotubes; Heat sources; Infrared image sensor; Noise equivalent temperature difference; Sensor arrays; Sensors; Carbon nanotube; Bolometer; Infrared image sensor
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/j.sna.2013.03.008

•We propose a plastic-based bolometer array sensor for low-cost IR imaging.•The CNT thin film thermistor of the sensor exhibited a TCR of −2.1%/K.•Measured responsivity of 69VB V/W (138V/W at VB=2.0V) was obtained.•Estimated NETD of 1.1K was obtained on the basis of noise measurement.•We confirmed the basic operation of IR imaging of a 64-pixel array sensor. We have developed an infrared image sensor based on bolometers on a plastic substrate that is potentially ultra low-cost due to its simple structure consisting of mainly organic materials. The bolometer includes a thermal isolator made of a very low thermal conductive polymer (parylene) and a newly developed, highly sensitive (TCR <−2%/K) carbon nanotube thin film thermistor. Experiment results showed that the responsivity of our sensor was 138V/W (at VB=2V) and the estimated noise equivalent temperature difference (NETD) at room temperature was 1.1K. The row-column type 64-pixel (8 × 8) array sensor was fabricated and evaluated while the image of a heat source was focused on the sensor array by a Ge lens. Utilizing the test readout circuit based on switching modules, we obtained the images of the heat source and confirmed the basic operation of IR imaging.