Microstructure, near infrared reflectance, and surface temperature of Ti-O coated polyethylene terephthalate fabrics prepared by roll-to-roll high power impulse magnetron sputtering system

• Published in: Thin solid films Vol. 663; pp. 1 - 8
• Main Authors: Nguyen, Thi-Thuy-Nga, Chen, Ying-Hung, Chen, Zih-Min, Cheng, Kuo-Bing, He, Ju-Liang
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.10.2018
• Subjects: Functional textiles; High power impulse magnetron sputtering; NIR reflectance; PET fabric; Roll-to-roll system; Ti-O coatings; Ti-O coatings; Functional textiles; High power impulse magnetron sputtering; Roll-to-roll system; PET fabric; NIR reflectance
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2018.08.003

Among numerous coating techniques used to deposit Ti-O thin films, high power impulse magnetron sputtering (HIPIMS) has attracted a great deal of attention recently due to its high plasma density, that forms a strongly adhered film at a relatively low temperature. In this study, a roll-to-roll high power impulse magnetron sputtering (R2R-HIPIMS) system to produce multifunctional Ti-O coatings on polyethylene terephthalate (PET) fabric substrate has been used, which takes advantage of large-scale production and high-quality coatings. Microstructure, NIR reflectance, and surface temperature of Ti-O coated PET fabrics have been investigated. Results indicate that the R2R-HIPIMS is a promising sputtering process in fabricating Ti-O coatings for applications in functional textiles. •Ti-O coatings were deposited on polyethylene terephthalate (PET) fabric substrate.•The structure of Ti-O films on PET fabrics changes at different O2/Ar flow ratios.•The coated fabrics at low O2 flow rate show low near infrared (NIR) reflectance.•The coated fabrics at a high O2/Ar flow ratio show high NIR reflectance.•Surface temperature of coated fabrics decreases with increase of NIR reflectance.