Deposition of Pt nanoclusters by means of gas aggregation cluster source

• Published in: Materials letters Vol. 79; pp. 229 - 231
• Main Authors: Kylián, O., Valeš, V., Polonskyi, O., Pešička, J., Čechvala, J., Solař, P., Choukourov, A., Slavínská, D., Biederman, H.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 15.07.2012
• Subjects: Agglomeration; Clusters; Deposition; Gas aggregation cluster source; Nanocomposite materials; Nanocomposites; Nanomaterials; Nanosized particles; Nanostructure; Platinum; spectroscopy; transmission electron microscopy; X-ray diffraction; Platinum; Deposition; Nanosized particles; Gas aggregation cluster source
• ISSN: 0167-577X; 1873-4979
• DOI: 10.1016/j.matlet.2012.04.022

The films of Pt nanoclusters were deposited by means of gas aggregation cluster source. At pressure of 100Pa in the aggregation chamber and magnetron current of 0.2A, highly porous films of metallic Pt clusters having average diameter of 4nm are deposited as witnessed by transmission electron microscopy and X-ray diffraction. The deposition rate as measured by spectroscopic ellipsometry is approximately 1nm/s. These results are promising in respect to possible use of this deposition technique for the fabrication of nanocomposite materials for diverse technological applications. ► Pt nanoclusters were produced by a simple gas aggregation nanocluster source. ► Produced films of Pt nanoclusters are highly porous. ► The mean size of individual nanoclusters is around 4nm. ► Pt nanoclusters retained their metallic character.