Crystal side facet-tuning of GaN nanowires and nanofins grown by molecular beam epitaxy

• Published in: Journal of applied physics Vol. 132; no. 18
• Main Authors: Pantle, Florian, Karlinger, Monika, Wörle, Simon, Becker, Fabian, Höldrich, Theresa, Sirotti, Elise, Kraut, Max, Stutzmann, Martin
• Format: Journal Article
• Language: English
• Published: 14.11.2022
• ISSN: 0021-8979; 1089-7550
• DOI: 10.1063/5.0098016

GaN nanostructures are promising for a broad range of applications due to their 3D structure, thereby exposing non-polar crystal surfaces. The nature of the exposed crystal facets, i.e., whether they are a-, m-plane, or of mixed orientation, impacts the stability and performance of GaN nanostructure-based devices. In this context, it is of great interest to control the formation of well-defined side facets. Here, we show that we can control the crystal facet formation at the nanowire sidewalls by tuning the III–V ratio during selective area growth by molecular beam epitaxy. Especially, the N flux serves as a tool for controlling the growth kinetics. In addition, we demonstrate the growth of GaN nanofins with either a- or m-plane side facets. Based on our observations, we present the underlying nanostructure growth mechanisms. Low temperature photoluminescence measurements show a correlation of the formation of structural defects like stacking faults with the growth kinetics. This article demonstrates the controlled selective epitaxy of GaN nanostructures with defined crystal side facets on large-scale available AlN substrates.