A compressed wide period-tunable grating working at low voltage

• Published in: Journal of semiconductors Vol. 31; no. 10; pp. 62 - 67
• Main Author: 刘翔 李铁 明安杰 王跃林
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.10.2010
• Subjects: MEMS; 光栅器件; 制作过程; 压缩; 电压可调; 红外光谱仪; 调谐范围; 驱动电压
• ISSN: 1674-4926
• DOI: 10.1088/1674-4926/31/10/104010

A MEMS compressed period-tunable grating device with a wide tuning range has been designed, fabricated and characterized. To increase the tuning range, avoid instability with tuning and improve the performance, we propose in this paper a period-tunable grating which is compressed by large-displacement comb actuators with tilted folded beams. The experimental results show that the designed grating device has a compression range of up to 144μm within 37 V driving voltage. The period of the grating can be adjusted continuously from 16 to 14 μm with a tuning range of 12.5%. The maximum tuning range of the first-order diffraction angle is 0.34° at 632.8 nm and the reflectivity of the grating is more than 92.6% in the mid-infrared region. The grating device can be fabricated by simple processes and finds applications in mid-infrared spectrometers.