A design method for process design kit based on an SMIC 65 nm process

• Published in: Journal of semiconductors Vol. 31; no. 10; pp. 115 - 120
• Main Author: 罗海燕 陈岚 尹明会
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.10.2010
• Subjects: IC设计; PDK; 国际; 基础; 工具包; 工艺设计; 纳米工艺; 结构化设计方法
• ISSN: 1674-4926
• DOI: 10.1088/1674-4926/31/10/105008

The frame structure of a process design kit （PDK） is described in detail, and a practical design method for PDK is presented. Based on this method, a useful SMIC 65 nm PDK has been successfully designed and realized, which is applicable to native EDA software of Zeni. The design process and difficulties of PDK are introduced by developing and analyzing these parameterized cell （Pcell） devices （MOS, resistor, etc.）. A structured design method was proposed to implement Pcell, which makes thousands upon thousands of source codes of Pcell concise, readable, easy-to-upkeep and transplantable. Moreover, a Pcase library for each Pcell is designed to verify the Pcell in batches. By this approach, the Pcell can be verified efficiently and the PDK will be more reliable and steady. In addition, the component description format parameters and layouts of the Pcell are optimized by adding flexibility and improving performance, which benefits analog and custom IC designers to satisfy the demand of design. Finally, the SMIC 65 nm PDK was applied to IC design. The results indicate that the SMIC 65 nm PDK is competent to support IC design.