Novel ferroelectric capacitor for non-volatile memory storage and biomedical tactile sensor applications

• Published in: Thin solid films Vol. 518; no. 24; pp. e152 - e155
• Main Authors: Liu, Shi Yang, Chua, Lynn, Tan, Kian Chuan, Valavan, S.E.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.10.2010
• Subjects: Biomedical; Capacitors; Coercive force; Doping; Fatigue (materials); Ferroelectric materials; Ferroelectricity; Ferroelectrics; Lead zirconate titanates; Leakage current; Non-volatile memory; Perovskite; Polarization; Sensor; Sol-gel; Spin-coating; Tactile; Thin films; Zirconium titanates; Thin films; Polarization; Perovskite; Non-volatile memory; Capacitors; Sol-gel; Spin-coating; Ferroelectrics; Tactile; Sensor; Biomedical

We report on novel ferroelectric thin film compositions for use in non-volatile memory storage and biomedical tactile sensor applications. The lead zirconate titanate (PZT) composition was modified by lanthanum (La 3+) (PLZT) and vanadium (V 5+) (PZTV, PLZTV) doping. Hybrid films with PZTV and PLZTV...