An RF MEMS switch with a differential gap between electrodes for high isolation and low voltage operation

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Bibliographic Details
Published inJournal of micromechanics and microengineering Vol. 21; no. 7; p. 075016
Main Authors Jang, Yeonsu, Kang, Sungchan, Kim, Hyeon Cheol, Chun, Kukjin
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.07.2011
Institute of Physics
Subjects
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Physics
Polyimide
Microwave
Quartz
Contact surface
Electrodes
Low voltage
Planarization
Wet process
High voltage
Spin-on coatings
Microwave circuit
Surface micromachining
Microelectromechanical device
Sacrificial layer
Production process
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/21/7/075016