Surface-micromachined silicon air-gap Bragg reflector for thermal infrared

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Bibliographic Details
Published inJournal of micromechanics and microengineering Vol. 21; no. 7; p. 075014
Main Authors Tuohiniemi, M, Blomberg, M
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.07.2011
Institute of Physics
Subjects
Electron, positron and ion microscopes, electron diffractometers and related techniques
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Physics
Scanning electron microscopy
Infrared spectroscopy
Fourier transformation
Pinning
Surface metrology
Concentrated load
Thickness measurement
Reflectivity
Anchors
Reflectors
Wavelengths
Model matching
Silicon oxides
Topography
Low pressure
Dimensional control
Surface micromachining
Modelling
Silicon
Profilometer
Mirrors
Profilometry
Microelectromechanical device
Sacrificial layer
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/21/7/075014