Structure and Superconductivity of Sputtered Bi-Sr-Ca-Cu-O Films from Various Targets
Bi-Sr-Ca-Cu-O films were prepared by use of the single-target sputtering method: deposited on [100] MgO substrates and then annealed at 860°C. Targets of three types were used: 1) mixed powder of, 2) calcined powder of, 3) a sintered disk of Bi 2 O 3 , SrCO 3 , CaCO 3 and CuO. Films made from the ty...
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| Published in | Japanese Journal of Applied Physics Vol. 28; no. 10A; pp. L1812 - 1815 |
|---|---|
| Main Authors | , , , |
| Format | Journal Article |
| Language | English |
| Published |
01.10.1989
|
| Online Access | Get full text |
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| Summary: | Bi-Sr-Ca-Cu-O films were prepared by use of the single-target sputtering method: deposited on [100] MgO substrates and then annealed at 860°C. Targets of three types were used: 1) mixed powder of, 2) calcined powder of, 3) a sintered disk of Bi
2
O
3
, SrCO
3
, CaCO
3
and CuO. Films made from the type 1) target almost peeled off from the substrate during the annealing, and small residual films consisted of
c
-axis-oriented phases of Bi
2
Sr
2
Ca
1
Cu
2
O
x
(2212), Bi
2
Sr
2
Ca
0
Cu
1
O
x
(2201) and a slight amount of Bi
2
Sr
2
Ca
2
Cu
3
O
x
(2223). The films from the type 2) and 3) targets did not peel off and consisted of randomly oriented 2212 and 2201 phases. |
|---|---|
| Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
| ISSN: | 0021-4922 1347-4065 |
| DOI: | 10.1143/JJAP.28.L1812 |