Fabrication of high-aspect-ratio microstructures using dielectrophoresis-electrocapillary force-driven UV-imprinting

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Bibliographic Details
Published inJournal of micromechanics and microengineering Vol. 21; no. 6; p. 065010
Main Authors Li, Xiangming, Shao, Jinyou, Tian, Hongmiao, Ding, Yucheng, Li, Xiangmeng
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.06.2011
Institute of Physics
Subjects
Applied fluid mechanics
Applied sciences
Cross-disciplinary physics: materials science; rheology
Electronics
Exact sciences and technology
Fluid dynamics
Fluidics
Fundamental areas of phenomenology (including applications)
Machinery and processing
Materials science
Materials synthesis; materials processing
Microelectronic fabrication (materials and surfaces technology)
Moulding
Physics
Plastics
Polymer industry, paints, wood
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Technology of polymers
Electrocapillarity
Gas liquid interface
Line contact
Liquid solid interface
Ultraviolet lithography
Electrical conduction
Nanostructures
Dielectrophoresis
Photolithography
High aspect ratio microstructure HARM
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/21/6/065010