Plasma-polymerized coatings for bio-MEMS applications

Coatings that provide either hydrophobic, hydrophilic, cell adhesive or cell non-adhesive functionalities have been deposited using three-phase low energy plasma-polymerization. The cell adhesive/non-adhesive coatings were tested using E. coli k-12. The four plasma-polymerized coatings are: para-xyl...

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 110; no. 1; pp. 390 - 394
Main Authors Bouaidat, S., Winther-Jensen, B., Christensen, S.Flygenring, Jonsmann, J.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.02.2004
Subjects
Bioactive surfaces
Cell adhesive
Cell non-adhesive
Lift-off
Micropatterning
Plasma-polymerized
Bioactive surfaces
Plasma-polymerized
Micropatterning
Lift-off
Cell non-adhesive
Cell adhesive
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Summary:Coatings that provide either hydrophobic, hydrophilic, cell adhesive or cell non-adhesive functionalities have been deposited using three-phase low energy plasma-polymerization. The cell adhesive/non-adhesive coatings were tested using E. coli k-12. The four plasma-polymerized coatings are: para-xylene (PX), 1-vinyl-2-pyrrolidinone (VP), polyvinyldifluoride (PVDF) and phosphorous glass (SiPOC), respectively. In addition, micropatterning of PX and VP has been performed on the same silicon substrate. Feature sizes down to 2 μm and precise alignment were obtained using lift-off and cleanroom photolithography techniques. The patterning process used did not influence the wetability of the coatings. The simplicity of the lift-off technique and the sturdiness and versatility of the plasma-polymerized coatings, make this ideal for MEMS, bio-MEMS and microfluidic applications, where patterned surfaces with different functionalities are required on for instance the same microchip.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2003.10.032