A low cost and hybrid technology for integrating silicon sensors or actuators in polymer microfluidic systems

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Bibliographic Details
Published inJournal of micromechanics and microengineering Vol. 18; no. 1; p. 017003
Main Authors Charlot, Samuel, Gué, Anne-Marie, Tasselli, Josiane, Marty, Antoine, Abgrall, Patrick, Estève, Daniel
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.01.2008
Institute of Physics
Subjects
Application fields
Applied fluid mechanics
Applied sciences
Exact sciences and technology
Fluid dynamics
Fluidics
Fundamental areas of phenomenology (including applications)
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Physics
Polymer industry, paints, wood
Precision engineering, watch making
Technology of polymers
Dimethylsiloxane polymer
Photofabrication
Measurement sensor
Leak
Interface circuit
Plastic packaging
Fluid structure interaction
Serigraphy
Silicon
Photolithography
Monitoring control system
Silicon polymer
Fluidics
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/18/1/017003