Surface generation analysis in micro end-milling considering the influences of grain

• Published in: Microsystem technologies Vol. 14; no. 7; pp. 937 - 942
• Main Authors: Wang, J. S., Gong, Y. D., Abba, G., Chen, K., Shi, J. S., Cai, G. Q.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Berlin/Heidelberg Springer-Verlag 01.07.2008; Springer
• Subjects: Applied sciences; Electronics; Electronics and Microelectronics; Engineering; Exact sciences and technology; Instrumentation; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical Engineering; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Nanotechnology; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Technical Paper; Surface Generation; Flank Face; Chip Formation; Soft Phase; Brittle Phase; Elastic constant; Elastic modulus; Deformation modulus; Chip formation; Microanalysis; Machining; Metal; Surface analysis; Experimental study; Grain boundary; Friction; Milling; Surface conditions
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-007-0478-y

The micro end-milling method is a universal micro manufacturing method used to fabricate micro parts and complex 3D micro structures with many materials. Although micrometer size is achieved, their surface quality is not satisfactory. In this paper, the influences of different metal phase grains are researched, and the micro end-milling process is described considering the workpiece with anisotropic properties in micro scope. In this research, the physical characteristics of different grains, specifically friction coefficient μ and elastic modulus E , are very critical to determine the processes of the chip formation and the surface generation. And the chips are often discontinuous because of the grain boundary effect. Through the micro end-milling experiment, the results of bottom surface correlate very well with the theoretical analysis.