A very sensitive porous silicon based humidity sensor

A relative humidity (RH) sensor device based on n-type porous silicon has been designed, fabricated and characterized. The simple device is a diode reverse dc biased, exhibiting an extremely high sensitivity in ambient air and a large operating range (30–70% RH). Aging and NO 2 interference on the s...

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Bibliographic Details
Published inSensors and actuators. B, Chemical Vol. 111; no. Complete; pp. 135 - 139
Main Authors Di Francia, G., Castaldo, A., Massera, E., Nasti, I., Quercia, L., Rea, I.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 11.11.2005
Subjects
Actuators
Aging
Devices
Diode
Diodes
Direct current
Humidity
Porous silicon
Relative humidity
Sensors
Aging
Diode
Porous silicon
RH
Humidity
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Summary:A relative humidity (RH) sensor device based on n-type porous silicon has been designed, fabricated and characterized. The simple device is a diode reverse dc biased, exhibiting an extremely high sensitivity in ambient air and a large operating range (30–70% RH). Aging and NO 2 interference on the sensor performance have been also investigated.
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ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2005.06.048