Dynamical Mechanism of Chemical Mechanical Polishing Analyzed to Correct Preston’s Empirical Model
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| Published in | Journal of the Electrochemical Society Vol. 153; no. 6; pp. G587 - G590 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
2006
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| Online Access | Get full text |
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| Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
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| ISSN: | 0013-4651 |
| DOI: | 10.1149/1.2193407 |