Characterization of plasma polymerized HMDSN films deposited by atmospheric plasma jet

• Published in: Surface & coatings technology Vol. 312; pp. 117 - 122
• Main Authors: Kodaira, F.V.P., Ricci Castro, A.H., Prysiazhnyi, V., Mota, R.P., Quade, A., Kostov, K.G.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 25.02.2017
• Subjects: APPJ; Atmospheric pressure plasma jet; HMDSN; Plasma polymer; Polymeric films; HMDSN; Plasma polymer; Atmospheric pressure plasma jet; Polymeric films; APPJ
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/j.surfcoat.2016.11.109

Deposition of plasma polymers using atmospheric pressure plasma jet in mixture of argon, air and hexamethyldisilazane (HMDSN) was studied. The HMDSN monomer, used as film precursor, was carried to the jet nozzle by an auxiliary airflow and mixed with principal argon flow. The films were deposited for different times using mean discharge power of 2.8W, main argon flow of 1SLM while the carrier flow (air+HMDSN) was 0.1SLM. The water contact angles measured across the obtained HMDSN plasma polymer film showed two well-defined areas, one hydrophilic, with contact angle near zero degrees and one hydrophobic, with contact angle around 100 degrees. The FTIR spectra showed that part of the original structure of HMDSN monomer was preserved and new chemical bonds were observed. XPS analysis showed that the deposited coatings are inorganic SiO2-like coatings. The films thickness was evaluated and it reached values about 2μm in the center and decreased to the border (in continuous deposition mode more rapidly than in the pulsed one). Roughness values were obtained and it is shown that they varied for each region of the film. •Polymer films were deposited using an atmospheric pressure plasma jet with HMDSN.•The deposited films were visually non homogeneous and insoluble in water.•The deposited films wettability was measured using goniometric technique.•Films' structure and composition were evaluated by FTIR and XPS.•Thickness and roughness of the film were probed by confocal microscopy.