Deposition of fluorine doped indium oxide by atmospheric pressure chemical vapour deposition
We report the deposition of fluorine doped indium oxide by atmospheric pressure chemical vapour deposition (APCVD) using a previously unreported precursor combination; dimethylindium acetylacetonate, [Me 2In(acac)] and trifluoroacetic acid (TFA). This process is potentially scalable for high through...
Saved in:
Published in | Thin solid films Vol. 520; no. 4; pp. 1242 - 1245 |
---|---|
Main Authors | , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Amsterdam
Elsevier B.V
01.12.2011
Elsevier |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | We report the deposition of fluorine doped indium oxide by atmospheric pressure chemical vapour deposition (APCVD) using a previously unreported precursor combination; dimethylindium acetylacetonate, [Me
2In(acac)] and trifluoroacetic acid (TFA). This process is potentially scalable for high throughput, large area production.
[Me
2In(acac)] is a volatile solid. It is more stable and easier to handle than traditional indium oxide precursors such as pyrophoric trialkylindium compounds.
Cubic fluorine doped indium oxide (F.In
2O
3) was deposited at a substrate temperature of 550
°C with growth rates exceeding 8
nm/s. Resistivity was 8
×
10
−
4
Ω
cm and transmission for a 200
nm film was >
80% with less than 1% haze. |
---|---|
Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/j.tsf.2011.04.206 |