Compact 600-W KrF laser

An analysis is made of the results of an experimental investigation of a high-power electric-discharge KrF laser with UV preionisation. It is shown that the average output power of the laser increases with increase in the pulse repetition rate up to 620 Hz, at which the maximum (for the investigated...

Full description

Saved in:
Bibliographic Details
Published inQuantum electronics (Woodbury, N.Y.) Vol. 28; no. 2; pp. 119 - 122
Main Authors Borisov, V M, Vinokhodov, A Yu, Vodchits, V A, Demin, A I, El'tsov, A V, Basting, D, Stamm, U, Voss, F
Format Journal Article
LanguageEnglish
Published United States IOP Publishing 28.02.1998
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:An analysis is made of the results of an experimental investigation of a high-power electric-discharge KrF laser with UV preionisation. It is shown that the average output power of the laser increases with increase in the pulse repetition rate up to 620 Hz, at which the maximum (for the investigated class of laser) average power of 630 W is reached. The results demonstrate a realistic promise of constructing an industrial KrF laser which has a stabilised output power of 300 - 500W. This laser can operate continuously when the stabilised average output power is 300 W: there is no need to replace the gaseous mixture for 8 h (12 x 10{sup 6} pulses). The pulse-to-pulse instability of lasing is then {approx} 2%. (lasers and amplifiers)
ISSN:1063-7818
1468-4799
DOI:10.1070/QE1998v028n02ABEH001148