Scanning thermal microscopy: A nanoprobe technique for studying the thermal properties of nanocomponents

In this paper, a novel micromachined scanning thermal microscopy (SThM) microcantilever with a sharp, conductive platinum tip is proposed for temperature and thermal conductivity measurements in sub‐micron structures of micro‐ and nanoelectronic components. The idea and physical background of SThM o...

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Published inPhysica Status Solidi (b) Vol. 248; no. 2; pp. 370 - 374
Main Authors Wielgoszewski, Grzegorz, Sulecki, Przemysław, Gotszalk, Teodor, Janus, Paweł, Grabiec, Piotr, Hecker, Michael, Ritz, Yvonne, Zschech, Ehrenfried
Format Journal Article
LanguageEnglish
Published Berlin WILEY-VCH Verlag 01.02.2011
WILEY‐VCH Verlag
Subjects
atomic force microscopy
Micromachining
Micromechanics
Nanocomposites
Nanomaterials
Nanostructure
Scanning thermal microscopy
Thermal properties
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Summary:In this paper, a novel micromachined scanning thermal microscopy (SThM) microcantilever with a sharp, conductive platinum tip is proposed for temperature and thermal conductivity measurements in sub‐micron structures of micro‐ and nanoelectronic components. The idea and physical background of SThM operation is presented, together with brief description of probes and example images of a planar polycrystalline‐silicon microfuse obtained using passive‐ and active‐mode SThM.
Bibliography:ArticleID:PSSB201046614
Dedicated to Dieter Schmeißer on the occasion of his 60th birthday
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ObjectType-Article-1
SourceType-Scholarly Journals-1
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content type line 23
ISSN:0370-1972
1521-3951
1521-3951
DOI:10.1002/pssb.201046614