Effective sputtering yields of alloys chromel and kopel with argon ions in magnetron sputtering system

This article presents the results of research on sputtering of thermoelectric alloys chromel and kopel. Sputtering was performed in argon atmosphere with magnetron sputtering system. Results of this work can be used in creation of thin-film thermoelectric generators.

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 1313; no. 1; pp. 12015 - 12018
Main Authors Dukhopelnikov, D V, Riazanov, V A, Plotnikova, O P
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.09.2019
Subjects
Argon ions
Magnetron sputtering
Photovoltaic cells
Physics
Thermoelectric generators
Thermoelectric materials
Thermoelectricity
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Summary:This article presents the results of research on sputtering of thermoelectric alloys chromel and kopel. Sputtering was performed in argon atmosphere with magnetron sputtering system. Results of this work can be used in creation of thin-film thermoelectric generators.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1313/1/012015