Micro gas-flow sensor with integrated heat sink and flow guide

A microsensor for gas-flow sensing applications with high sensitivity (700 mV at a flow velocity of 2.7 m s −1 and a supply voltage of 3 V), low power consumption (8 mW at 55 K over-temperature and an airflow velocity of 0.8 m s −1) and short response time is presented. A heat sink and flow guide in...

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 54; no. 1; pp. 547 - 551
Main Authors Qiu, Li, Hein, Stefan, Obermeier, Ernst, Schubert, Axel
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.06.1996
Subjects
ANSYS/FLOTRAN
FEM simulations
Flow guides
Heat sinks
Micro gas-flow sensors
Flow guides
Micro gas-flow sensors
ANSYS/FLOTRAN
Heat sinks
FEM simulations
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Summary:A microsensor for gas-flow sensing applications with high sensitivity (700 mV at a flow velocity of 2.7 m s −1 and a supply voltage of 3 V), low power consumption (8 mW at 55 K over-temperature and an airflow velocity of 0.8 m s −1) and short response time is presented. A heat sink and flow guide integrated on the backside of the microsensor is used to modulate the temperature distribution on the diaphragm to achieve an extended measurement range. Results from device simulation, technological processing and sensor performance are discussed.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(97)80012-X