Development of Silicon Micromachined Microlens Antennas at 1.9 THz

The development at 1.9 THz of a microlens antenna consisting of a leaky-wave waveguide feeding and a silicon microlens is presented in this paper. The antenna has excellent performances compared to horn antennas and can be fabricated entirely using silicon micromachining. Two antenna prototypes were...

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Bibliographic Details
Published inIEEE transactions on terahertz science and technology Vol. 7; no. 2; pp. 191 - 198
Main Authors Alonso-delPino, Maria, Reck, Theodore, Jung-Kubiak, Cecile, Choonsup Lee, Chattopadhyay, Goutam
Format Journal Article
LanguageEnglish
Published Piscataway IEEE 01.03.2017
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Antenna
Diameters
Directivity
Fabrication
Feeds
Horn antennas
Leaky waves
leaky-wave terahertz (THz)
lens
Lenses
microlens
Microlenses
Micromachining
Microoptics
Prototypes
shallow lens
Silicon
submillimeter wave
Surface treatment
Waveguides
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Summary:The development at 1.9 THz of a microlens antenna consisting of a leaky-wave waveguide feeding and a silicon microlens is presented in this paper. The antenna has excellent performances compared to horn antennas and can be fabricated entirely using silicon micromachining. Two antenna prototypes were developed: one with a 2.6-mm-diameter microlens and a directivity of 33.2 dB and the other with a 6.35-mm-diameter microlens and a directivity of 41.2 dB. Both prototypes were fabricated and measured, obtaining good agreements with simulations. The fabrication, assembly, and measurement process are explained and detailed in this paper.
ISSN:2156-342X
2156-3446
DOI:10.1109/TTHZ.2017.2655340