Self-supporting tetrahedral amorphous carbon films consisting of multilayered structure prepared using filtered arc deposition
Self-supporting 110-nm-thick tetrahedral amorphous carbon (ta-C) films with a multilayered structure were fabricated as a carbon film target for the laser-driven ion acceleration. The self-supporting ta-C films consisted of three layers with the thicknesses of 35 nm, 40 nm, and 35 nm thick, and the...
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| Published in | Thin solid films Vol. 675; pp. 123 - 127 |
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| Main Authors | , , , , , , , , , , , |
| Format | Journal Article |
| Language | English |
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Elsevier B.V
01.04.2019
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| Abstract | Self-supporting 110-nm-thick tetrahedral amorphous carbon (ta-C) films with a multilayered structure were fabricated as a carbon film target for the laser-driven ion acceleration. The self-supporting ta-C films consisted of three layers with the thicknesses of 35 nm, 40 nm, and 35 nm thick, and the film density of 3.0 g/cm3, 2.7 g/cm3, and 3.0 g/cm3, respectively. The multilayered ta-C film was fabricated using the T-shape filtered arc deposition method on a Si substrate coated water-soluble material. Silk fibroin and dextran were used as the water-soluble material. The water-soluble material formed between a ta-C film and a Si substrate was dissolved, and then, the ta-C film released from the substrate. Thick single-layer ta-C films partially peeled off on the water-soluble material and broke during the dissolving process. Self-supporting ta-C films were obtained by scooping the released ta-C film on a perforated substrate. The laser was irradiated on the self-supporting ta-C films, and the ta-C film with a higher film thickness and/or film density showed a higher laser irradiation tolerance.
•Fabrication of self-supporting 110-nm-thick tetrahedral amorphous carbon (ta-C) films•A sacrificial layer dissolution method is used for the fabrication.•Silk fibroin and dextran used as a sacrificial layer•The self-supporting films have a flat shape without wrinkles and cracks.•High laser irradiation tolerance with increasing thickness or density of the ta-C films |
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| AbstractList | Self-supporting 110-nm-thick tetrahedral amorphous carbon (ta-C) films with a multilayered structure were fabricated as a carbon film target for the laser-driven ion acceleration. The self-supporting ta-C films consisted of three layers with the thicknesses of 35 nm, 40 nm, and 35 nm thick, and the film density of 3.0 g/cm3, 2.7 g/cm3, and 3.0 g/cm3, respectively. The multilayered ta-C film was fabricated using the T-shape filtered arc deposition method on a Si substrate coated water-soluble material. Silk fibroin and dextran were used as the water-soluble material. The water-soluble material formed between a ta-C film and a Si substrate was dissolved, and then, the ta-C film released from the substrate. Thick single-layer ta-C films partially peeled off on the water-soluble material and broke during the dissolving process. Self-supporting ta-C films were obtained by scooping the released ta-C film on a perforated substrate. The laser was irradiated on the self-supporting ta-C films, and the ta-C film with a higher film thickness and/or film density showed a higher laser irradiation tolerance.
•Fabrication of self-supporting 110-nm-thick tetrahedral amorphous carbon (ta-C) films•A sacrificial layer dissolution method is used for the fabrication.•Silk fibroin and dextran used as a sacrificial layer•The self-supporting films have a flat shape without wrinkles and cracks.•High laser irradiation tolerance with increasing thickness or density of the ta-C films |
| Author | Nishiuchi, Mamiko Takikawa, Hirofumi Miyamoto, Yu Kunitsugu, Shinsuke Kondo, Kiminori Harigai, Toru Suda, Yoshiyuki Kaneko, Satoru Yamano, Masafumi Kawano, Takeshi Tanimoto, Tsuyoshi Sakaki, Hironao |
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| Keywords | Carbon film target Self-supporting film Laser irradiation tolerance Diamond-like carbon Laser-driven ion acceleration Tetrahedral amorphous carbon Multilayer film |
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| SubjectTerms | Carbon film target Diamond-like carbon Laser irradiation tolerance Laser-driven ion acceleration Multilayer film Self-supporting film Tetrahedral amorphous carbon |
| Title | Self-supporting tetrahedral amorphous carbon films consisting of multilayered structure prepared using filtered arc deposition |
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