Self-supporting tetrahedral amorphous carbon films consisting of multilayered structure prepared using filtered arc deposition

• Published in: Thin solid films Vol. 675; pp. 123 - 127
• Main Authors: Harigai, Toru, Miyamoto, Yu, Yamano, Masafumi, Tanimoto, Tsuyoshi, Suda, Yoshiyuki, Takikawa, Hirofumi, Kawano, Takeshi, Nishiuchi, Mamiko, Sakaki, Hironao, Kondo, Kiminori, Kaneko, Satoru, Kunitsugu, Shinsuke
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.04.2019
• Subjects: Carbon film target; Diamond-like carbon; Laser irradiation tolerance; Laser-driven ion acceleration; Multilayer film; Self-supporting film; Tetrahedral amorphous carbon; Carbon film target; Self-supporting film; Laser irradiation tolerance; Diamond-like carbon; Laser-driven ion acceleration; Tetrahedral amorphous carbon; Multilayer film
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2019.02.022

Self-supporting 110-nm-thick tetrahedral amorphous carbon (ta-C) films with a multilayered structure were fabricated as a carbon film target for the laser-driven ion acceleration. The self-supporting ta-C films consisted of three layers with the thicknesses of 35 nm, 40 nm, and 35 nm thick, and the film density of 3.0 g/cm3, 2.7 g/cm3, and 3.0 g/cm3, respectively. The multilayered ta-C film was fabricated using the T-shape filtered arc deposition method on a Si substrate coated water-soluble material. Silk fibroin and dextran were used as the water-soluble material. The water-soluble material formed between a ta-C film and a Si substrate was dissolved, and then, the ta-C film released from the substrate. Thick single-layer ta-C films partially peeled off on the water-soluble material and broke during the dissolving process. Self-supporting ta-C films were obtained by scooping the released ta-C film on a perforated substrate. The laser was irradiated on the self-supporting ta-C films, and the ta-C film with a higher film thickness and/or film density showed a higher laser irradiation tolerance. •Fabrication of self-supporting 110-nm-thick tetrahedral amorphous carbon (ta-C) films•A sacrificial layer dissolution method is used for the fabrication.•Silk fibroin and dextran used as a sacrificial layer•The self-supporting films have a flat shape without wrinkles and cracks.•High laser irradiation tolerance with increasing thickness or density of the ta-C films