Coatings based on chromium carbide fabricated by an arc sputtering of graphite and Cr-Al(Si) targets

Single CrAlC, CrAlSiC and multilayer [CrAlC/a-C]n, [CrAlSiC/a-C]n coatings have been fabricated and investigated. Joint use of arc plasma source with Cr-Al(Si) cathode and pulsed arc plasma source with graphite cathode was applied to single coatings deposition. Diamond-like a-C layers alternate with...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 1393; no. 1; pp. 12124 - 12128
Main Authors Rubshtein, A P, Vladimirov, A B, Plotnikov, S A
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.11.2019
Subjects
Aluminum
Arc deposition
Cathodes
Chromium carbide
Coatings
Coefficient of friction
Diamond films
Diamonds
Graphite
High resistance
Multilayers
Physics
Plastic deformation
Silicon carbide
Welded joints
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Summary:Single CrAlC, CrAlSiC and multilayer [CrAlC/a-C]n, [CrAlSiC/a-C]n coatings have been fabricated and investigated. Joint use of arc plasma source with Cr-Al(Si) cathode and pulsed arc plasma source with graphite cathode was applied to single coatings deposition. Diamond-like a-C layers alternate with CrAl(Si)C in multilayer coatings. The doping of CrAlC with silicon is accompanied by an increase in their crystallinity due to the formation of silicon carbide particles. Structural changes make CrAlSiC films harder with a low friction coefficient and a high resistance to plastic deformation. The multilayer coatings are crack resistant.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1393/1/012124