Novel SThM nanoprobe for thermal properties investigation of micro- and nanoelectronic devices

• Published in: Microelectronic engineering Vol. 87; no. 5; pp. 1370 - 1374
• Main Authors: Janus, P., Szmigiel, D., Weisheit, M., Wielgoszewski, G., Ritz, Y., Grabiec, P., Hecker, M., Gotszalk, T., Sulecki, P., Zschech, E.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.05.2010; Elsevier
• Subjects: Applied sciences; Atomic Force Microscopy; Condensed matter: structure, mechanical and thermal properties; Electronics; Exact sciences and technology; Microelectronic fabrication (materials and surfaces technology); Micromachining; Micromechanics; Molecular electronics, nanoelectronics; Nanocomposites; Nanomaterials; Nanostructure; Physics; Reproducibility; Scanning Thermal Microscopy; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Thermal properties of condensed matter; Thermal properties of small particles, nanocrystals, nanotubes; Atomic Force Microscopy; Scanning Thermal Microscopy; Thermal properties; Atomic force microscopy; Microelectronic fabrication; Material processing; Platinum; Reproducibility; Thermal behavior; Micromachining; Focused ion beam technology; Cantilever beam; Scanning thermal microscopy; Nanoelectronics
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2009.11.178

In this paper, we present a novel micromachined Atomic Force Microscopy (AFM) micro-cantilever equipped with a sharp, conductive platinum tip. The processing sequence proposed in this article integrates a high reproducibility and precise post-processing applying Focused Ion Beam tip modification. The cantilever is designed for Scanning Thermal Microscopy (SThM) applications in a standard setup with the optical AFM detection system.