Spacial Resolution Enhancement for Integrated Magnetic Probe by Two-Step Removal of Si-Substrate Beneath the Coil

This paper presents an enhancement of high spacial resolution magnetic probe for the applications of measuring magnetic fields emitted from cryptography micro-electronic devices. The on-chip sensing system includes a magnetic pick-up coil, three-stage low-noise amplifier, mixer, and low-pass filter....

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Bibliographic Details
Published inIEEE transactions on magnetics Vol. 51; no. 1; pp. 1 - 4
Main Authors Nguyen Ngoc Mai-Khanh, Iizuka, Tetsuya, Nakajima, Shigeru, Asada, Kunihiro
Format Journal Article
LanguageEnglish
Published New York IEEE 01.01.2015
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Coils
Cryptography
Eddy currents
Magnetic circuits
Magnetism
Mixers
Noise
Probes
on-chip coil
sensing
Si-substrate (Si-SUBS)
focused-ion-beam (FIB)
high-resolution
mixer
Down-conversion
near-field magnetic
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Summary:This paper presents an enhancement of high spacial resolution magnetic probe for the applications of measuring magnetic fields emitted from cryptography micro-electronic devices. The on-chip sensing system includes a magnetic pick-up coil, three-stage low-noise amplifier, mixer, and low-pass filter. Noise problems are reduced by the proposal of using the down-conversion mixer. A two-step removal of Si-substrate (Si-SUBS) areas is also proposed by applying a focused-ion-beam process to avoid eddy currents that reduces the coil sensitivity. Four probe chips are fabricated in a 0.18 um CMOS five-metal layer process with different coil sizes and with/without Si-SUBS removals. Experimental results on a thin wire and micro-strip line show the proposed system achieves high spacial resolution and sensitivity for near-field magnetic scanning.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2014.2359245