Multi-target reactive sputtering- : A promising technology for large-area Pb(Zr,Ti)O3 thin film deposition
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Published in | Journal of the European Ceramic Society Vol. 27; no. 13-15; pp. 3789 - 3792 |
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Main Authors | , , , , |
Format | Conference Proceeding Journal Article |
Language | English |
Published |
Oxford
Elsevier
2007
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Subjects | |
Online Access | Get full text |
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ISSN: | 0955-2219 1873-619X |
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DOI: | 10.1016/j.jeurceramsoc.2007.02.032 |