New approach to estimate nanowear test results through nanoindentation test

• Published in: Microelectronic engineering Vol. 87; no. 5; pp. 1404 - 1409
• Main Authors: Ekwińska, M.A., Rymuza, Z.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.05.2010; Elsevier
• Subjects: Applied sciences; Condensed matter: structure, mechanical and thermal properties; Deformation and plasticity (including yield, ductility, and superplasticity); Elastic deformation; Electronics; Energy per volume of removed/deformed material; Estimates; Exact sciences and technology; Materials; Mechanical and acoustical properties of condensed matter; Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology; Mechanical properties of solids; Metals. Metallurgy; Micro- and nanoelectromechanical devices (mems/nems); Nanocomposites; Nanoindentation; Nanoindentation test; Nanomaterials; Nanostructure; Nanowear test; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Simulation; Tribology; Energy per volume of removed/deformed material; Nanowear test; Nanoindentation test; Nanoindentation; Mechanical properties; Nanoelectromechanical device; Elastic material; Nanostructure; Plastic deformation; Elastoplasticity; Plastic material; Simulation program; Properties of materials; Microelectromechanical device; Comparative study
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2009.11.159

High development of MEMS/NEMS structures has caused the need to know material properties in micro- and nano-scale. Unfortunately well-known macro-scale material properties could not be used in micro- and nano-scale. Therefore, there was a need to perform experiments in micro- and nano-scale. For that purpose, the most often nanoindentation and nanowear tests were used. The first one was time consuming, complicated and it gave tribological parameters of the material under investigation. The second one was a simple, quick test that gave information about mechanical properties of the material. In order to shorten time required for estimation of material properties authors have invented a simulation program that could estimate nanowear test results through nanoindentation test results. In this program both tests were simulated in such a way that elastic and plastic material deformations were taken into account. A set of nanoindentation test were used for setting simulation parameters as well as for verification of results achieved through simulation of nanoindentation process. A set of nanowear tests were used for verification of simulation test results. In addition, a comparison of mentioned above tests from the energy approach was made.