Nanophotonic crystals with chiral elements by a hot embossing process in SU-8

• Published in: Microelectronic engineering Vol. 85; no. 5-6; pp. 866 - 869
• Main Authors: Lu, Bing-Rui, Wan, Jing, Xie, Shen-Qi, Shu, Zhen, Sun, Yan, Chen, Yifang, Qu, Xin-Ping, Liu, Ran
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.05.2008; Elsevier Science
• Subjects: Applied sciences; Circuit properties; Diffraction activities; Electric, optical and optoelectronic circuits; Electronics; Exact sciences and technology; General (including economical and industrial fields); Hot embossing; Integrated optics. Optical fibers and wave guides; Materials; Microelectronic fabrication (materials and surfaces technology); Nanophotonic crystals; Optical and optoelectronic circuits; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; SU-8; Nanophotonic crystals; SU-8; Hot embossing; Diffraction activities; Radiation hardening; Integrated optics; Mass production; Optical diffraction; Hot process; Industrial application; Light diffraction; Nanolithography; Nanophotonics; Microelectronic fabrication; Ultraviolet radiation; Photonic crystal; Optical characteristic; Economic aspect
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2007.12.085

We report a novel nanoprocess to fabricate 2D metallic and non-metallic nanophotonic crystals on SU-8 using hot embossing combining with a UV-curing process. The fabricated photonic crystals were characterized by optical diffraction experiments. Theoretical simulation of the light diffraction through such kind of artificial crystals agrees with the measured optical property very well, indicating that the developed fabrication technique is able to produce large area nanosize photonic crystals at economic costs. The success of this work not only provides scientists with a good opportunity to pioneer novel photonic physics in metallic and non-metallic chiral as well as photonic crystal systems, but also bridges the gap between laboratory and industrial application for mass production of photonic nanostuctures.