Aspects of micro structuring low temperature co-fired ceramic (LTCC) for realisation complex 3D objects by embossing

• Published in: Microelectronic engineering Vol. 84; no. 5; pp. 1198 - 1201
• Main Authors: Andrijasevic, Daniela, Smetana, Walter, Zehetner, Johann, Zoppel, Sandra, Brenner, Werner
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.05.2007; Elsevier Science
• Subjects: Applied sciences; Ceramic; Electronics; Embossing; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; MEMS structuring; Micro- and nanoelectromechanical devices (mems/nems); Optoelectronic devices; Physics; Scanning probe microscopes, components and techniques; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Embossing; Ceramic; MEMS structuring; Microoptoelectromechanical device; Scanning electron microscopy; Circuit design; Ceramic materials; Computer aided design; Microelectromechanical device
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2007.01.152

The purpose of this paper is to demonstrate the possibilities for structuring unfired low temperature co-fired ceramic (LTCC) in order to obtain complex 3D-micro structures using specially designed and developed tools for embossing process. The focus will be on the fabrication of different structures with potential use in MOEMS or Bio-MEMS applications. Motivation for selection of LTCC for these applications in addition to fabrication of the structures will be explained in details. Preliminary investigation and optical inspection by means of the surface quality is performed at scanning electron microscope and non-contact optical profilometer. Based on obtained results, first improvements are introduced.