Effects of Ambient Humidity on a Micromachined Silicon Thermal Wind Sensor

• Published in: Journal of microelectromechanical systems Vol. 23; no. 2; pp. 253 - 255
• Main Authors: BEI CHEN, ZHU, Yan-Qing, MING QIN, HUANG, Qing-An
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.04.2014; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Density; Exact sciences and technology; Heating; Heating equipment; Humidity; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical instruments, equipment and techniques; Micromachining; Micromechanical devices and systems; Micromechanics; Physics; Relative humidity; Sensors; Silicon; Silicon sensor; Temperature; Temperature measurement; Temperature sensors; thermal wind sensors; Relative humidity; Viscosity; thermal wind sensors; Temperature gradients; Measurement sensor; Micromachining; Silicon sensor; High temperature; Temperature sensors; Temperature measurement; Specific heat; Humidity effect; Heating elements; humidity; Silicon; Microsensors; Microelectromechanical device
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2014.2298403

The effect of ambient humidity on a micromachined silicon 2-D thermal wind sensor has been investigated. The sensor includes a central heater and four temperature sensors. It measures the flow-induced temperature gradient on the heated surface. Properties of the ambient air, such as density, viscosity, heat conductivity, and specific heat capacity, are theoretically presented to explore their effects on the performance of the sensor at different relative humidity levels. The output of the sensor as a function of wind speed at different relative humidity levels has been measured. It shows that there is a measurable effect at both high relative humidity and temperature. The results presented here provide a valuable reference for the practical applications of the wind sensor.