Smart Acquisition EELS

Electron energy loss (EEL) spectroscopy and high angle annular dark field (HAADF) imaging in aberration-corrected electron microscopes are powerful techniques to determine the chemical composition and structure of materials at atomic resolution. We have implemented Smart Acquisition, a flexible syst...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 241; no. 1; p. 012010
Main Authors Sader, K, Schaffer, B, Vaughan, G, Wang, P, Bleloch, A L, Brydson, R, Brown, A
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.07.2010
Subjects
Aberration
Chemical composition
Electron energy loss spectroscopy
Electron microscopes
Energy dissipation
Field emission
Microscopes
Physics
Spectrum analysis
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Summary:Electron energy loss (EEL) spectroscopy and high angle annular dark field (HAADF) imaging in aberration-corrected electron microscopes are powerful techniques to determine the chemical composition and structure of materials at atomic resolution. We have implemented Smart Acquisition, a flexible system of scanning transmission electron microsocpy (STEM) beam position control and EELS collection, on two aberration-corrected dedicated cold field emission gun (FEG) STEMs located at SuperSTEM, Daresbury Laboratory. This allows the collection of EEL spectra from spatially defined areas with a much lower electron dose possible than existing techniques such as spectrum imaging.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/241/1/012010