A novel closed-form resistance model for trapezoidal interconnects

• Published in: Journal of semiconductors Vol. 31; no. 8; pp. 93 - 97
• Main Author: 陈宝君 唐祯安 余铁军
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.08.2010
• Subjects: 互连线; 封闭形式; 形式模型; 数值方法; 梯形截面; 电流密度分布; 电阻; 频率依赖性
• ISSN: 1674-4926
• DOI: 10.1088/1674-4926/31/8/084011

A closed-form model for the frequency-dependent per-unit-length resistance of trapezoidal cross-sectional interconnects is presented.The frequency-dependent per-unit-length resistance R（f） of a trapezoidal interconnect line is first obtained by a numerical method.Using the method we quantify the trapezoid edge effect on the resistance of the interconnect and the current density distribution in the cross section.Based on this strict numerical result,a novel closed-form model R（f） for a single trapezoidal interconnect is fitted out using the Levenberg-Marquardt method. This R（f） can be widely used for analyzing on-chip interconnects when the frequency is changing.The model is computationally very efficient with respect to the numerical method,and the results are found to be accurate.