Viscosity data from thermal imprint experiments

• Published in: Microelectronic engineering Vol. 86; no. 4; pp. 688 - 690
• Main Authors: Scheer, H.-C., Bogdanski, N., Shibata, M., Möllenbeck, S.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.04.2009; Elsevier
• Subjects: Applied sciences; Electronics; Exact sciences and technology; Fingerprint stamp; Microelectronic fabrication (materials and surfaces technology); Polymer characterisation; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Thermal imprint; Thermal imprint; Polymer characterisation; Fingerprint stamp; Microelectronic fabrication; Fingerprint identification; Polymer; Replication; Cost lowering; Optimization
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2008.12.040

As a simple, low-cost alternative to rheological characterisation of an imprint polymer a novel approach is put forward, the derivation of imprint-relevant characteristic material parameters, here the viscosity, directly from imprint experiments. Imprints are performed at different temperatures with a fingerprint stamp, designed to allow replication of micron-sized linear structures without lateral constraint and independent from their neighbourhood. Under such conditions the squeezed flow theory applies and the viscosity can be determined from the imprint depth. For a typical material in thermal imprint, 25 kg/mol PMMA, a broad agreement with rheological viscosity data could be obtained. Though the result requires critical assessment, the simplicity of the approach is appealing. Such procedure is promising for an easy access to material data for imprint process optimisation.